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詳細情報 |
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| 重さ: | 純重量：150kg;総重量：160kg | 製品名: | 24駅のスピンコーティングライン |
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| 塗装方法: | スピンコーティング | アプリケーションタイプ: | 産業用 |
| 材料: | パルプ | 制御インターフェース: | 7インチナイロンタッチスクリーン |
| 安全機能: | 非常停止、過負荷保護 | 主なセールスポイント: | パルス・モールド・コーティング |
製品の説明
High-Throughput 24-Position Automatic Spin Coating System – For Wafer, Glass, OLED Substrates – Customizable Dispensing
Product Overview
The 24-Station Spin Coater is a high-throughput thin-film coating system designed for uniform deposition of photoresist, polymers, sol-gel, and nanoparticles onto wafers, glass substrates, or discs. Each station can be independently programmed or run in batch mode.
The machine is fully customizable - station arrangement, spin speed profiles, dispensing method, bowl material, and exhaust design - to suit R&D, pilot line, or production environments.
Technical Parameters
| Parameter | Standard Value | Customizable Range |
|---|---|---|
| Number of stations | 24 | 12 / 16 / 24 / customizable |
| Max substrate diameter | 8 inches (200 mm) | Up to 12 inches (300 mm) customizable |
| Spin speed range | 100 - 8000 RPM | 1 - 12000 RPM customizable |
| Speed accuracy | ±1 RPM | ±0.5 RPM customizable (closed-loop) |
| Acceleration range | 100 - 20000 RPM/s | Customizable via software |
| Programmable steps | 10 steps per recipe | Customizable (unlimited via PC) |
| Recipe storage | 100 recipes (on HMI) | Customizable (network drive / cloud) |
| Dispense types | Static, dynamic, line, spiral | Customizable nozzle pattern & timing |
| Bowl material | Polypropylene (PP) | PTFE / stainless steel / glass customizable |
| Vacuum chuck type | Single center hole | Multi-zone / edge grip customizable |
| Exhaust flow rate | 60 m³/h per station | Customizable to cleanroom requirements |
| Power supply | 220V / 50Hz (single phase) | 110V - 240V, 50/60Hz customizable |
Applications
- Semiconductor / MEMS - photoresist coating for wafers (2″ to 8″)
- OLED / display manufacturing - polymer layer deposition
- University & research labs - material science, sol-gel films
- Medical device coating - bio-compatible films
- Customizable for: perovskite solar cells, carbon nanotube deposition, thick-film pastes
Key Features
- Batch or independent station operation - each station can run different recipes
- Closed-loop RPM control - maintains speed under varying loads
- Edge bead removal (EBR) optional on selected stations
- Auto-dispense synchronization with spin acceleration profile
- Vacuum sense & interlock - prevents spin without proper chuck vacuum
- Touchscreen interface with real-time speed / time / step display
Customization Options
All models support full customization:
- Number of stations (up to 48 in dual-tier configuration)
- Spin motor type (brushless DC / servo / air-driven)
- Dispensing automation (syringe pump / peristaltic / pressurized tank)
- Environmental control (temperature / humidity / inert gas purging)
- Cleanroom compatibility (Class 10 to Class 100,000 - customizable)
- SECS/GEM or RS232 data export for manufacturing execution systems
Support and Services
- 24-month warranty on electronics, 12 months on motors
- Lifetime phone / email / WhatsApp technical support
- On-site training and installation (for industrial models)
- Spare parts shipped globally within 48 hours
- Customization engineering support (CAD drawings + PLC code) included
Packing and Shipping
- Packing: Anti-static vacuum bag + foam fixture + reinforced export carton (bench models) or plywood crate (floor models)
- Shipping methods: DHL/FedEx (small units), sea freight (FOB/CIF), air cargo
- Delivery lead time: 20 - 45 days based on customization level
Frequently Asked Questions
Q: Can all 24 stations run simultaneously at different speeds?
A: Yes and no - In independent motor version (higher cost), yes. In shared-drive version, all run same speed but can have different dispense timing - customizable to your need.
Q: What is the minimum substrate size the chuck can hold?
A: Standard chucks hold 2″ to 8″. For smaller pieces (1 cm × 1 cm), we can customize vacuum chucks with reduced vacuum zones.
Q: Can I use this coater for high-viscosity materials (like SU-8 or thick photoresist)?
A: Yes. We can customize the motor torque and dispense nozzle (larger gauge) for high-viscosity applications.
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