|
詳細情報 |
|||
| 膜厚: | 180g～400g | インバーターブランド: | シュナイダー |
|---|---|---|---|
| 方向の運搬: | 左から右。 | 湿度: | 50±10°C |
| 登録の精度: | ±0.15mm | 機械試験報告書: | 提供された |
| 平均速度: | 0～20m/分 | マックスコーティング幅: | 790*1150mm |
| ハイライト: | 12-station automatic spin coater,semiconductor film deposition machine,perovskite spin coating equipment |
||
製品の説明
HIGH-PRECISION 12-STATION AUTOMATIC SPIN COATER FOR SEMICONDUCTOR & PEROVSKITE FILM PREPARATION
Technical Parameters
| Parameter | Value / Range | Customization Option |
|---|---|---|
| Number of stations | 12 | Customizable: 4 / 8 / 12 / 16 stations |
| Speed range | 100 - 10,000 rpm | Extendable to 12,000 rpm |
| Acceleration range | 50 - 10,000 rpm/s | Customizable |
| Speed accuracy | ±1 rpm | - |
| Max substrate size | 150 mm diameter | Customizable up to 200 mm |
| Chamber material | PP / PTFE / 316L stainless steel | Customizable contact materials |
| Environmental control | Exhaust & purge available | Customizable N₂ purge module |
| Program storage | 1000+ recipes | - |
| Power supply | AC 220V / 50Hz | Customizable to 110V / 60Hz |
Applications
- Perovskite solar cell films
- Photoresist coating (semiconductor lithography)
- Sol-gel thin films
- OLED & quantum dot emitting layers
- Biosensor coatings
- Customizable for non-planar or flexible substrates
Customization Options
- Number of stations, layout, dispensing path
- Chamber size and material (acid-resistant, solvent-resistant)
- Automatic cleaning & waste solvent recovery system
- Heating / UV / IR post-coating curing modules
- Factory MES/ERP data interface integration
Key Features
- 12 independently driven stations with separate motors & control
- High acceleration response - reaches set speed in <0.5 seconds
- Multi-point dispensing programming - supports dynamic/static dispensing
- Cross-contamination prevention - independent exhaust channels per station
- One-click recipe recall with optional barcode scanning startup
- Customizable safety interlock & e-stop logic
Support and Services
- Global remote support (TeamViewer/VPN)
- On-site installation & training (optional)
- Process consulting - viscosity/speed/thickness modeling
- Local spare parts stock - customizable spare parts kit available
- 18-month warranty (excluding intentional damage)
Packing and Shipping
- Shockproof wooden case (ISTA standard compliant)
- Desiccant & humidity indicator included inside
- Shipping methods: sea / air / land - customizable export labeling & fumigation certificate available
- Lead time: 4 weeks for standard models, 6-8 weeks for customized models
Frequently Asked Questions
Q1: Can it coat 8-inch wafers?
A: Standard max is 150 mm - chamber customizable up to 200 mm.
Q2: Can different stations run different recipes simultaneously?
A: Yes - each station is independently programmable.
Q3: Is N₂ environment coating supported?
A: Full-chamber N₂ purge with oxygen monitoring is customizable.
この製品の詳細を知りたい
