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詳細情報 |
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| 電圧: | 220V/380V | コンベヤ速度: | 25〜80m/min |
|---|---|---|---|
| 製品名: | 1.5kw | 効率的な平坦化幅: | 920mm |
| コーティング材: | 各種素材 | UVランプタイプ: | 水銀ランプ |
| 巻き戻し折りエラー: | ±0.1mm | 乾燥タイプ: | IR乾燥 |
製品の説明
Industrial Excimer Laser Processing System
Flexible Production Line Integration & Fully Customizable Parameters
Product Overview
This industrial excimer laser processing system is designed for high-precision microfabrication, semiconductor annealing, and thin-film patterning. It supports full integration into automated production lines with real-time monitoring. The system features a gas-sealed excimer source with long lifetime optics and AI-assisted process control.
Production Line Composition
- Excimer laser source unit
- Beam shaping & homogenization module
- High-speed XY scanning stage or mask projection unit
- Inline substrate handling robot (customizable track width)
- Exhaust & gas management system
- Process control PC with recipe manager
Technical Parameters
| Parameter | Value Range (Standard) | Customization Option |
|---|---|---|
| Wavelength | 193 nm / 248 nm / 308 nm | Multi-wavelength switchable (custom) |
| Max pulse energy | 0.5 - 1200 mJ | Up to 2000 mJ (custom) |
| Pulse frequency | 1 - 6000 Hz | Up to 10 kHz (custom) |
| Average power | 5 - 300 W | Custom scaling available |
| Beam size (exit) | 10 × 10 mm | Rectangular beam up to 50×50 mm (custom) |
| Beam homogeneity | < ±3% (σ) | < ±1% (custom optics) |
| Production line integration | SMEMA / SECS/GEM | Custom PLC protocol (custom) |
Applications
- Silicon annealing for advanced displays (LTPS)
- MEMS & semiconductor wafer dicing
- Polymer surface activation
- Medical device micro-structuring
- Flexible PCB drilling
Customization Options
We offer full customization of wavelength selection, pulse energy, scanning field size, gas mixture, cooling method (air/water/chiller), and production line communication protocol. Customized beam delivery arms and class-1 enclosures are also available upon request.
Key Features
- > 2000 hours gas lifetime (optimized gas mixture)
- Built-in energy stabilization (real-time feedback)
- Remote diagnostics & predictive maintenance
- Low cost of ownership (LOO) with bypass gas-saving mode
- Compact modular design for quick line reconfiguration
Support and Services
- 24/7 technical support (phone/remote)
- On-site installation & production line integration
- Custom training for your engineers
- Extended warranty up to 5 years
- Gas refill & optics refurbishment program
Packing and Shipping
- Sealed in moisture-controlled, shock-dampened container
- Vacuum-sealed optics box
- Shipping via air or sea with real-time tracking
- Export crates meet ISPM-15 standard
Frequently Asked Questions
Q1: Can you customize the laser head size for a compact production line?
Yes, the laser head and beam delivery path are fully customizable to fit narrow or odd-shaped line spaces.
Q2: What is the lead time for a customized system?
Standard: 8-10 weeks; customized: 12-14 weeks including design validation.
Q3: Do you support integration with existing MES?
Yes, we provide custom SECS/GEM, OPC-UA, or Modbus interfaces.
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